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SENSOR DATA COLLECTION
TSMS
Collects equipment sensor data across multiple channels and integrates it with higher-level systems through standard communication protocols,
providing the data foundation required for process monitoring and anomaly detection
BEFORE & AFTER
Existing Operation Environment vs Changes After Implementation
Transition from individual sensor configurations to a multi-channel integrated structure.
BEFORE
Existing Operation Environment
- Individual Connection Architecture Individual sensor connections increase system complexity.
- Space Constraints Additional wiring and data acquisition devices require more installation space around the equipment.
- Decentralized Management Distributed sensor acquisition configurations increase maintenance workload.
- PC/OS-Dependent Architecture Requires ongoing management to ensure operational stability.
AFTER
Changes After Implementation
- Integrated Multi-Channel Data Acquisition Collects data from multiple sensors through a single module.
- Simplified Installation Architecture Simplifies interface configuration and overall installation complexity.
- Unified Communication Architecture Consolidates data acquisition into a module-centric communication structure.
- Proprietary Operating System Supports stable and reliable operation in production environments.
DATA FLOW
From Sensor Data Acquisition to Anomaly Detection
Connecting process data through a seamless flow: Data Acquisition → TSMS → FDC.
01
Up to 40 Channels of
Diverse Data Sources, including
Temperature, Vibration, Pressure, and RF
Data Acquisition
Standard Equipment Sensors
Additional Sensors
02
TSMS
Real-Time Monitoring
- Real-Time Trace Data AcquisitionRecipe Step Alignment
- Signal Preprocessing / Normalization
- Data Quality Validation
Fault Detection
- Rule-Based Anomaly Detection
- Multi-Condition Monitoring
- Threshold / Trend / Rate Detection
- Real-Time Anomaly Alerts
03
FDC
Data collector
High-Speed Data Acquisition / Buffering
Real-time Engine
Real-Time Processing / Monitoring
KEY BENEFITS
Core Values Offered by TSMS
01
Expanded Anomaly Detection Coverage
Connect multiple sensor points—such as temperature, pressure, vibration, and position—across a single piece of equipment for broader anomaly detection coverage.
02
Reduced Deployment & Operating Costs
Supports up to 40 channels in a single module, reducing individual sensor installation requirements as well as installation, wiring, and maintenance costs.
03
Improved Real-Time Data Reliability
Enables rapid monitoring of process condition changes through 0.1-second data communication, improving the continuity and reliability of data required for anomaly detection.
04
Flexible Configuration & Long-Term Usability
Supports both existing and newly added sensors, enabling flexible system expansion and stable long-term operation.
VISION DATA MONITORING
SSDAM
Collects multi-channel vision sensor data from inside and outside the chamber and integrates it with higher-level systems through standard communication protocols, providing the data required for process monitoring.
BEFORE & AFTER
Existing Process Environment vs Changes After Implementation
BEFORE
Existing Operating Environment
CCTV
- Reliance on Visual Inspection Relies on operator visual inspection, resulting in variations in evaluation criteria.
- Inconsistent Evaluation Criteria Differences in operator judgment make it difficult to consistently identify subtle signs of abnormalities.
- Limited Anomaly History Limited availability of data from the time an abnormality occurs.
- Reactive Inspection Video footage is reviewed only after an issue occurs, limiting the ability to respond in real time.
AFTER
Changes After Implementation
- Vision Data-Based Monitoring Monitors process conditions based on vision sensor data.
- Detection Tool Configuration Defines anomaly detection criteria by configuring process-specific detection conditions.
- Video & Log Storage Stores data captured at the time of an anomaly for traceability and historical review.
- Integration with Higher-Level Systems Integrates detection results and related data with higher-level systems such as FDC or monitoring platforms.
SSDAM DATA FLOW
From Sensor Data Acquisition to Anomaly Detection
Connecting process data through a seamless flow: Vision Sensor → SSDAM → FDC.
01
Up to 40 Channels
Data Acquisition
Vision Sensors
Inside / Outside
the Chamber
Additional Sensors
02
SSDAM
Vision Processing
- Frame-by-Frame Real-Time Video Stream Analysis
- Customizable Multi-Channel Real-Time Processing
- Image Preprocessing & Filtering
Integrated Anomaly Detection
- High-Precision Image-Based Anomaly Detection
- Automatic Storage of Anomaly Logs and Original Images / Video
- All-in-One Processing (Monitoring / Detection / Processing)
03
FDC
Data collector
High-Speed Data Acquisition / Buffering
Real-time Engine
Real-Time Processing / Monitoring
KEY BENEFITS
Core Values Offered by SSDAM
01
Flexible Chamber Configuration
Supports flexible vision sensor configurations based on the number and structure of equipment chambers, including 8-chamber and 12-chamber systems.
02
Multi-Point Detection Setup
Enables multiple anomaly detection points within a single piece of equipment to be monitored simultaneously through configurable vision tools.
03
Customized Data Output
Provides detection data in various formats, including numerical values, images, and graphs, based on customer requirements.
04
Standardized Vision-Based Evaluation
Evaluates process conditions using predefined vision tool criteria, reducing operator-to-operator variation compared with manual visual inspection.
YIELD MANAGEMENT
YMS
(Yield Management System)
수율 현황과 불량 데이터를 관리하고
품질 추적과 공정 개선을 지원하는
수율 관리 시스템
Yield Management System
KEY FUNCTIONS
YMS의 핵심 관리 영역
검사 데이터부터 수율, 불량, 품질 이력까지 하나의 흐름으로 관리합니다.
1. 검사 데이터 수집
- 검사 장비, 측정 결과, Wafer/Die Bin 데이터 수집
- Wafer, Lot, Recipe 등 관련 정보 연계
- 다양한 소스 데이터 통합
2. 수율 현황 관리
- 제품, Lot, Wafer 단위 수율 현황 확인
- 목표 수율 대비 결과 관리
- 수율 변화 추이 확인
3. 불량 데이터 관리
- 불량 유형(Defect) 분류
- 불량 발생 위치 관리 (Wafer Map)
- 불량 빈도 및 패턴 분석
4. 품질 이력 조회
- Wafer / Lot 단위 검사 이력 조회
- 공정 이력과 검사 이력 연계
- 품질 상태 및 불량 이력 추적
YMS PROCESS
YMS의 핵심 기능
데이터 입력
검사 장비 / 검사 결과 데이터 Wafer / Lot 정보 공정 이력 불량 데이터01
데이터 정합
검사·공정·Lot 데이터 기준 정합 및 데이터 검증
02
수율 집계
제품·Lot·Wafer 단위 수율 계산 및 통계 관리
03
불량 분류
Defect, Bin, Fail 데이터 유형별 분류
04
이력 추적
Wafer / Lot 기준 검사 이력 조회 및 공정 이력 연계
수율 분석 및 활용
수율 Dashboard Wafer Map Trend Chart 품질 Report MES / 검사장비 연계수율 가시성 확보제품·Lot·공정별 수율 흐름을 체계적으로 확인
품질 추적성 강화Wafer와 Lot 기준으로 검사·공정 이력을 연계
불량 관리 체계화불량 유형, 위치, 빈도 데이터를 기반으로 관리
공정 개선 데이터 확보수율과 불량 데이터를 기반으로 개선 지원
FAULT DETECTION
FDC
(Fault Detection and Classification)
장비·센서·공정 데이터를 실시간으로 모니터링하여
이상 상태를 감지·분류하는 시스템
Real-time Fault Detection & Classification
FDC CORE FUNCTIONS
실시간 데이터에서 이상 감지·분류까지
수집된 장비·센서·공정 데이터를 실시간으로 처리하고 현장 대응에 필요한 정보를 제공합니다.
실시간 데이터 수집
- 설비·PLC·센서·계측기·Event/Log 데이터 수집
- 시계열 데이터 기반 모니터링 환경 구성
공정 모니터링
- 주요 파라미터 변화와 장비 상태 실시간 확인
- Trace, Trend, Event 상태 가시화
Rule 기반 이상감지
- Threshold, UCL/LCL, Trend 기준 감지
- 이상 발생 시 알람 및 이벤트 생성
Fault Classification
- 감지된 이상 상태 유형별 분류
- 알람 이력과 함께 조회 및 관리
FDC PROCESS
FDC의 핵심 기능
데이터 입력
설비 / PLC SECS/GEM 센서 / 계측기 Event / Log1
실시간 모니터링
실시간 Trace 수집
Recipe Step 확인
Data Quality 확인
2
Fault Detection
Rule 기반 이상 감지
Threshold / UCL·LCL 감시
Trend / Rate 변화 감지
3
Fault Classification
이상 유형 분류
관리 기준 기반 분류
알람 연계
4
이력·가시화
Trend Chart
Dashboard
Alarm History / Event 이력
데이터 활용 및 연계
실시간 Dashboard 알람 / Event Trend Chart MES / APC 연계신뢰성안정적인 수집과 처리로 지속적인 운영 지원
표준 연계SECS/GEM 및 다양한 인터페이스 지원
유연한 구성설비·공정 환경에 맞춘 Rule 및 알람 설정
효율적인 운영실시간 모니터링과 이력 제공으로 현장 대응 효율 향상